Shield Cleaning
Pristine Shield Cleaning Services with Integrated Precious Metal Recovery
The thin film deposition industry relies on significant quantities of precious metals in the form of targets, boats, pellets, and grain for coating applications. During the deposition process, only a small percentage of the source material is applied to the substrate or wafer. The remaining material, commonly referred to as over-deposition or over-spray, accumulates on chamber walls, shielding, and process tooling.
Shields play a critical role within the deposition chamber by:
- Protecting chamber components from excessive coating buildup
- Capturing particulates that could contaminate substrates or wafers
- Providing a high-surface-area collection point for valuable precious metals
As coating layers increase in thickness or begin to flake, the shielding and tooling must be removed, cleaned, and returned to service. At the same time, the accumulated precious metals represent a significant recoverable asset.
Noble Metal Services offers comprehensive shield cleaning services designed to maximize precious metal recovery while returning thoroughly cleaned shields ready for reuse.
Our Process
Shield cleaning is far more sophisticated than abrasive blasting. It requires an in-depth understanding of component geometry, material compatibility, and cleanliness specifications throughout every stage of the process.
Depending on the coating material and substrate, shields may undergo specialized chemical etching using carefully selected solutions before precision micro-blasting removes remaining deposits.
Precision micro-blasting removes any remaining residues, restoring the shields to a pristine condition while preserving critical dimensions and surface integrity.
Turn Maintenance Into Measurable Return
Shield cleaning transforms a routine expense into a recovery opportunity. By capturing deposited metals and extending equipment life, we help reduce costs while improving overall material return.